| Affiliation: | 1. Department of Materials Science and Engineering, University of Illinois at Urbana‐Champaign, Urbana, IL 61801, USA;2. Department of Mechanical Science and Engineering, Center for Nanoscale Chemical‐Electrical‐Mechanical, Manufacturing Systems, University of Illinois at Urbana‐Champaign, Urbana, IL 61801, USA;3. Department of Electrical and Computer Engineering, University of Illinois at Urbana‐Champaign, Urbana, IL 61801, USA;4. Semprius Inc., 4915 Prospectus Dr., Suite C, Durham, NC 27713, USA;5. Department of Materials Science and Engineering, Chemistry, Science and Engineering, Electrical, and Computer Engineering, Beckman Institute for Advanced Science and Technology, and Frederick, Seitz Materials Research Laboratory, University of Illinois at Urbana‐Champaign, Urbana, IL 61801, USA |
