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Tin Dioxide Sensing Layer Grown on Tubular Nanostructures by a Non‐Aqueous Atomic Layer Deposition Process |
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| Authors: | Catherine Marichy Nicola Donato Marc‐Georg Willinger Mariangela Latino Dmitry Karpinsky Seung‐Ho Yu Giovanni Neri Nicola Pinna |
| Affiliation: | 1. Department of Chemistry, CICECO, University of Aveiro, 3810‐193 Aveiro, Portugal;2. Department of Matter Physics and Electronics Engineering, University of Messina, 98166 Messina, Italy;3. Department of Chemical Science and Technologies, University of Rome, Tor Vergata, Italy;4. Department of Ceramics and Glass Engineering, CICECO, University of Aveiro, 3810‐193 Aveiro, Portugal;5. School of Chemical & Biological Engineering and Research Center for Energy Conversion & Storage, Seoul National University (SNU), Seoul 151‐744, Korea;6. Department of Industrial Chemistry and Materials Engineering, University of Messina, Contrada di Dio, Vill. S. Agata, 98166, Messina, Italy;7. Email:pinna@ua.pt;11. pinna@snu.ac.kr;12. World Class University (WCU) program of Chemical Convergence for Energy & Environment (C2E2), School of Chemical and Biological Engineering, College of Engineering, Seoul National University (SNU), Seoul 151‐744, Korea |
| Abstract: | A new atomic layer deposition (ALD) process for nanocrystalline tin dioxide films is developed and applied for the coating of nanostructured materials. This approach, which is adapted from non‐hydrolytic sol‐gel chemistry, permits the deposition of SnO2 at temperatures as low as 75 °C. It allows the coating of the inner and outer surface of multiwalled carbon nanotubes with a highly conformal film of controllable thickness. The ALD‐coated tubes are investigated as active components in gas‐sensor devices. Due to the formation of a p‐n heterojunction between the highly conductive support and the SnO2 thin film an enhancement of the gas sensing response is observed. |
| Keywords: | tin oxide atomic layer deposition carbon nanotubes sensors nanoparticles |