| 基体表面粗糙度对磁控溅射TiN涂层界面结合力的影响 |
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| 引用本文： | 韦习成,李健,袁成清.基体表面粗糙度对磁控溅射TiN涂层界面结合力的影响[J].机械工程材料,2001,25(1):35-37. |
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| 作者姓名： | 韦习成 李健 袁成清 |
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| 作者单位： | 1. 上海大学材料科学与工程学院,
2. 武汉材料保 护研究所, |
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| 基金项目： | 机械工业技术发展基金资助项目!(95 JA0 5 0 2 ) |
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| 摘 要： | 利用球与平面的赫兹接触应力分布的经验修正公式∧［1］，对磁控溅处理前的基体表面粗糙度对沉积层和基体的界面结合力进行了研究，并和其他涂层界面结合力的测量方法方法进行了比较。结果表明：基体表面粗糙度对界面结合力有很大影响，表面粗糙度的改善有利于TiN层/基体的界面结合力的提高，同时改善了TiN层的摩擦学性能。
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| 关 键 词： | 表面粗糙度 界面结合力 赫兹接触 氮化钛涂层 PVD 磁控溅射 |
| 文章编号： | 1000-3738(2001)01-0035-03 |
| 修稿时间： | 1999年10月11 |
Effect of Surface Roughness on Boundary Adhesion of Magnetic Sputtered TiN Coating |
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| WEI Xi-cheng,LI Jian,YUAN Cheng-qing.Effect of Surface Roughness on Boundary Adhesion of Magnetic Sputtered TiN Coating[J].Materials For Mechanical Engineering,2001,25(1):35-37. |
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| Authors: | WEI Xi-cheng LI Jian YUAN Cheng-qing |
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| Affiliation: | WEI Xi cheng 1,LI Jian 2,YUAN Cheng qing 2 |
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| Abstract: | The boundary adhesion strength of magnetic sputtered TiN coatings on GCr15 steel substrates with different surface roughness was studied employing the revised Hertz contact stress formulas based on ball/plane 1] The measured and calculated data were compared with those got by other methods The results showed that the surface roughness of substrate influenced greatly the adhesion of TiN coating deposited by magnetic sputtering deposition process Improving the surface roughness of substrate is beneficial to increasing the adhesion of TiN coating, and then to improving its tribological property This study is important in advising the practical application of TiN coating |
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| Keywords: | suface roughness boundary adhesion TiN hertzian contact |
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