Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

This paper develops a 30 mm × 30 mm × 50 mm spherical micro actuator driven by piezoelectric ceramic stacks (PZT), and analyzes its dynamic performances. First, the space coordinate relationship of the spherical micro actuator and a dynamic model are set up. Second, The Runge-Kutta arithmetic is used to calculate the dynamical parameters of the micro actuator; the SIMULINK module of MATLAB is used to build the dynamical simulating model and then simulate it. Third, an experimental sample of the spherical micro actuator is developed, a micromanipulator is integrated with a micro-gripper based on the sample spherical micro actuator, and the experimental research on the micro assembly is conducted between a micro shaft of Φ180 μm and a micro spindle sleeve of Φ200 μm. Finally, the characteristics of the spherical micro actuator influenced by the mass of the metal sphere of the micro actuator, driving signal frequency, friction coefficient of the contact surface between the metal sphere and the friction block of the micro driving unit are analyzed. The experimental results indicate that the rotation resolution of the micro actuator reaches 0.000 1°, the rotation positioning precision reaches 0.000 5°, and the maximum working frequency is about 1200 Hz. The experimental results validate the back rotation vibration model of the spherical micro actuator. The micromanipulator integrated by the spherical micro actuator can meet the requirements of precise micro operation and assembly for micro electro mechanical systems (MEMS) or other microelements in micro degree fields. __________ Translated from Optics and Precision Engineering, 2007, 15(2): 248–253 译自: 光学精密工程]