| 脉冲磁过滤阴极弧等离子体制备四面体非晶碳膜 |
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| 引用本文： | 张成武,李国卿,柳翠,关秉羽. 脉冲磁过滤阴极弧等离子体制备四面体非晶碳膜[J]. 真空, 2004, 41(4): 114-116 |
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| 作者姓名： | 张成武 李国卿 柳翠 关秉羽 |
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| 作者单位： | 1. 大连理工大学三束材料改性国家重点实验室,辽宁,大连,116024
2. 沈阳北宇真空设备厂,辽宁,沈阳,110045 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 介绍了脉冲磁过滤阴极电弧法制备四面体非晶碳膜(tetrahedral amorphous carbon即ta-C),并对制得的薄膜表面形貌、硬度、电阻等进行了测试.结果表明,脉冲磁过滤阴极电弧法制备的ta-C膜有优良的性能.拉曼光谱分析显示,制得的薄膜为非晶结构,有明显的sp3结构特征,符合ta-C膜的特征峰.
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| 关 键 词： | 四面体非晶碳膜 磁过滤 拉曼分析 偏压 |
| 文章编号： | 1002-0322(2004)04-0114-03 |
Preparation of ta-C films by pulsed magnetic filtered cathode arc deposition |
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| ZHANG Cheng-wu,LI Guo-qing,LIU Cui,GUAN Bing-yu. Preparation of ta-C films by pulsed magnetic filtered cathode arc deposition[J]. Vacuum(China), 2004, 41(4): 114-116 |
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| Authors: | ZHANG Cheng-wu LI Guo-qing LIU Cui GUAN Bing-yu |
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| Affiliation: | ZHANG Cheng-wu~1,LI Guo-qing~1,LIU Cui~1,GUAN Bing-yu~2 |
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| Abstract: | The deposition process of tetrahedral amorphous carbon by a pulsed magnetic filtered cathodic arc deposition system is briefly introduced. The properties of the films, such as morphology, hardness and resistance, are also tested. The (results) showed that the films have excellent performance. According to Raman spectra, the films are of amorphous structure and have the characteristics of sp~3 bonds and ta-C films. |
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| Keywords: | tetrahedral amorphous Carbon (ta-C) magnetic filtration Raman spectrum bias |
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