| 超薄平面结构电涡流传感器的研究 |
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| 引用本文： | 吴桔生 朱长纯. 超薄平面结构电涡流传感器的研究[J]. 传感技术学报, 1995, 8(3): 35-38 |
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| 作者姓名： | 吴桔生 朱长纯 |
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| 作者单位： | 西安交通大学电子工程系!西安市710049 |
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| 摘 要： | 介绍用集成电路微细加工技术研制出的一种新型超薄平面结构的电涡流传感器探头。用理论模拟对线圈半径与绕向进行设计，并配制了适宜的二次电路，制造出微位移测试样机。同传统结构的电涡传感器探头相比，灵敏度提高了１６％，线性度改善２％。
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| 关 键 词： | 传感器 电涡流传感器 超薄平面结构 |
Research on the Super-thin Film Structure Eddy Current Transducer |
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| Wu Jusheng Zhu Changchun. Research on the Super-thin Film Structure Eddy Current Transducer[J]. Journal of Transduction Technology, 1995, 8(3): 35-38 |
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| Authors: | Wu Jusheng Zhu Changchun |
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| Abstract: | A sample of micro-shift measuring apparatus has been developed, the probeof which is a film coil fabricated with integrated circuit micro-processing technology.The device of the film coil is optimized basing on theoretical simulation, equiped withappropriate secondary circuit. Its sensitivity is increased by 16% and linearity is im-proved by 2%, comparing to traditional one. |
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| Keywords: | transducer eddy current micro-shift |
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