| Z轴微机械陀螺仪的空气阻尼分析 |
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| 引用本文： | 王伟,刘军洁. Z轴微机械陀螺仪的空气阻尼分析[J]. 西安工业大学学报, 2010, 30(3): 219-223 |
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| 作者姓名： | 王伟 刘军洁 |
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| 作者单位： | 西安工业大学,光电工程学院,西安,710032 |
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| 摘 要： | 为了提高Z轴微机械陀螺的动态特性,采用ANSYS模态分析和流体薄膜技术完成滑膜阻尼和压膜阻尼的计算,分析了空气阻尼对陀螺的品质因数、灵敏度等性能的影响,研究结果表明,具有对称解耦能力的微机械陀螺仪主要产生滑膜阻尼,阻尼系数较小,约为1.3E-5kg/s,微机械陀螺品质因数为900.结合工艺误差和结构设计特性,提出减小微机械陀螺空气阻尼的优化方案.
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| 关 键 词： | 空气阻尼 微机械陀螺 平板运动结构 对称解耦 |
Study of Air Damping of Z-axis MEMS Gyroscope |
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| WANG Wei,LIU Jun-jie. Study of Air Damping of Z-axis MEMS Gyroscope[J]. Journal of Xi'an Institute of Technology, 2010, 30(3): 219-223 |
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| Authors: | WANG Wei LIU Jun-jie |
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| Affiliation: | (School of Optoelectronic Engineering,Xi＇an Technological University,Xi＇an 710032,China) |
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| Abstract: | Aiming at improving the dynamic characteristic of Z-axis MEMS gyro,modal analysis and thin film technology with ANSYS are adopted to calculate the slide film damping and squeeze film damping, then, the effects of air damping on quality factor and sensitivity of gyro are evaluated. Analysis results show that the air damping in driving mode and detecting mode mainly are slide film damping and damping force is 1.3E-5 kg/s, so this gyro has high Quality Factor（900） in atmospheric pressure. At last,optimization schema to decrease air damping of gyro is introduced from processing tolerance and total structure design. |
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| Keywords: | air damping MEMS gyro plate movement symmetric decoupling |
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