| 红外焦平面成像器件发展现状 |
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| 引用本文： | 陈伯良. 红外焦平面成像器件发展现状[J]. 红外与激光工程, 2005, 34(1): 1-7 |
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| 作者姓名： | 陈伯良 |
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| 作者单位： | 中国科学院,上海技术物理研究所,上海,200083 |
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| 摘 要： | 红外焦平面列阵成像技术已经进入了成熟期。本文对几种红外焦平面列阵器件如MCT、InSb和QWIP的最新进展作一评述，简要介绍其器件发展水平、技术路线和关键工艺。简要提及一种新颖的非制冷焦平面成像技术：光学读出微光机红外接收器。
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| 关 键 词： | 红外焦平面列阵 碲镉汞 锑化铟 量子阱红外探测器 |
| 文章编号： | 1007-2276(2005)01-0001-07 |
| 收稿时间： | 2004-02-04 |
| 修稿时间： | 2004-02-04 |
Development state of IRFPA imaging device |
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| CHEN Bo-liang. Development state of IRFPA imaging device[J]. Infrared and Laser Engineering, 2005, 34(1): 1-7 |
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| Authors: | CHEN Bo-liang |
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| Abstract: | Infrared focal plane array (IRFPA) imaging technology has been matured during the passed decade. In this paper an overview of recent progress to several kind of IRFPA such as MCT, InSb and QWIP is provided , focusing on new device development, technical lines and key technologies. Also, a new type of uncooled FPA imaging technique--micro-optomechanical infrared receiver with optical readout is briefly introduced. |
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| Keywords: | IRFPA MCT InSb QWIP |
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