| 平面磁芯螺旋结构微电感的性能研究 |
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| 引用本文： | 冯书谊,周勇,周志敏,向毅.平面磁芯螺旋结构微电感的性能研究[J].电子元件与材料,2009,28(2). |
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| 作者姓名： | 冯书谊 周勇 周志敏 向毅 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，上海市科学技术委员会资助项目，重点实验室基金，基础科研资助项目 |
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| 摘 要： | 采用MEMS技术(包括光刻、电镀、反应离子刻蚀和机械抛光等)研制了平面磁芯螺旋结构微电感,磁芯材料为铁基纳米晶带材。其中线圈匝数为18匝,线圈导体的宽度和间隙均为30μm,厚度为20μm;电感的尺寸为3mm×3mm。测试结果表明:在频率为1~10MHz时,电感量和品质因数分别为3.2~1.2μH和2.3~1.1;在1MHz下,电感量和品质因数分别为3.2μH和2.3,可应用于微型化DC/DC变换器。
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| 关 键 词： | 平面磁芯螺旋结构微电感 MEMS技术 电感量 品质因数 |
Study on property of planar spiral structure microinductor with magnetic core |
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| FENG Shuyi,ZHOU Yong,ZHOU Zhimin,XIANG Yi.Study on property of planar spiral structure microinductor with magnetic core[J].Electronic Components & Materials,2009,28(2). |
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| Authors: | FENG Shuyi ZHOU Yong ZHOU Zhimin XIANG Yi |
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| Affiliation: | National Key Lab of Micro/Nano Fabrication Technology;Key Lab for Thin Film and Micro Fabrication of Ministry of Education;Institute of Micro/Nano Science & Technology;Shanghai Jiaotong University;Shanghai 200240;China |
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| Abstract: | A planar spiral structure microinductor with Fe-based nano-crystalline ribbon as magnetic core was fabricated by MEMS technology, including photoetching, electroplating, RIE and mechanical polishing etc. The dimension of microinductor is 3 mm×3 mm with 18 coil turns, 30 μm in width and space, 20 μm in coil thickness. The results show that the inductor has a good property in 1~10 MHz with inductance of 3.2~1.2 μH and quality factor of 2.3~1.1, respectively. The inductance is 3.2 μH with quality factor of 2.3 at 1 MHz, and it is attractive for the application of micro DC/DC converter. |
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| Keywords: | planar spiral structure microinductor with magnetic core MEMS technology inductance quality factor |
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