基于适度光反馈自混合干涉技术的微位移测量

光反馈自混合干涉技术是一种新出现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行位移的精密测量,提出了一种基于适度光反馈自混合干涉技术的位移测量方法。采用条纹记数法实现大范围位移粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的方法,从而提高位移测量的分辨力。用绝对精度达3nm的商用压电陶瓷驱动器比对实验,结果验证了这种三角波调制外反射体在普通实验室环境噪声中可以达到纳米级的位移测量精度。实验数据处理结果表明,对于3μm以下的位移,该算法位移测量相对误差约为1.20%。

Measuring tiny displacement based on moderate optical feedback self-mixing interferometry

Optical feedback self-mixing interferometry is an emerging sensing and measurement technique,which is quite different with traditional double-beam interferometry.To perform precision displacement measurement under the condition of moderate optical feedback,a displacement measurement method was proposed based on moderate optical feedback self-mixing interference.Firstly,rough measurement of displacement was carried out by counting the fringe numbers with the resolution of half wavelength.Then based on the st...