| 一种新颖的MEMS光开关测量平台的设计与实现 |
| |
| 引用本文： | 刘小冬,刘睿.一种新颖的MEMS光开关测量平台的设计与实现[J].半导体技术,2003,28(11):16-18,23. |
| |
| 作者姓名： | 刘小冬 刘睿 |
| |
| 作者单位： | 吉林大学电子科学与工程学院微电子学专业,吉林,长春,130023 |
| |
| 摘 要： | 随着光电器件的广泛应用，微机械光开关成为核心光交换器件的主流。在研发过程中，其器件检测手段成为人们所关注的话题。本文介绍了一种新颖的测量平台，通过高幅值利用单片机控制脉冲频率的方法来选择器件。与当前同类方法相比，具有精度高、可靠性强、成本低、易操作等特点，具有广阔的使用前景。
|
| 关 键 词： | MEMS 光开关 单片机 微机械 阈值电压 方波信号源 测量平台 工作原理 |
| 文章编号： | 1003-353(2003)11-0016-03 |
A new method for estimating and measuring drive voltage of torsion beam structure micromechanical optical switches |
| |
| LIU Xiao-dong,LIU Rui.A new method for estimating and measuring drive voltage of torsion beam structure micromechanical optical switches[J].Semiconductor Technology,2003,28(11):16-18,23. |
| |
| Authors: | LIU Xiao-dong LIU Rui |
| |
| Abstract: | Recent advances in optical devices and computer technology have enabled thedevelopment of new optical systems and techniques for measurement. Designing and measuringsmall structures such as micromechanical optical switches necessitates various devices, which maybring errors. The theoretical elements of algorithms for torsion beam structure micromechanicaloptical switches were introduced. Microcontroller techniques to effectively analyze and test high-performance optical systems were presented. A new and elaborated method for estimating and mea-suring drive voltage of torsion beam structure micromechanical were given. |
| |
| Keywords: | microcontroller measuring micromechanical optical switches threshold-voltage |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
