RF MEMS phase shifters based on PCB MEMS technology |
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| Authors: | Ramadoss R Sundaram A Feldner LM |
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| Affiliation: | Electr. & Comput. Eng. Dept., Auburn Univ., AL, USA; |
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| Abstract: | An X-band main-line type loaded line RF MEMS phase shifter fabricated using printed circuit based MEMS technology is reported. The phase shifter provides a phase shift of 31.6/spl deg/ with a minimum insertion loss of 0.56 dB at 9 GHz for an applied DC bias voltage of 40 V. These phase shifters are suitable for monolithic integration with low-cost phased arrays on Teflon or Polyimide such as low dielectric constant substrates. |
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