| 薄膜电感器的研究与应用 |
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| 引用本文： | 唐晓莉,张怀武,苏桦.薄膜电感器的研究与应用[J].磁性材料及器件,2005,36(3):9-12. |
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| 作者姓名： | 唐晓莉 张怀武 苏桦 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054 |
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| 摘 要： | 目前IT系统向高集成度、高频宽带化方向发展,要求在更小的基片上集成更多的元器件,这除了依靠高密度集成技术的发展外,从器件本身出发,研制小型化、薄膜化的器件,以减小系统的整体体积、重量,才能达到降低功率损耗、提高信号传输效率的要求.本文主要介绍为满足上述要求,作为三大无源器件之一的电感器的薄膜化进程,以及目前薄膜电感器的应用情况及发展前景展望.
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| 关 键 词： | 薄膜电感 磁性薄膜 小型化 应用 |
| 文章编号： | 1001-3830(2005)03-0009-04 |
Research and Application of Thin-film Inductor |
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| TANG Xiao-li,ZHANG Huai-wu,SU Hua.Research and Application of Thin-film Inductor[J].Journal of Magnetic Materials and Devices,2005,36(3):9-12. |
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| Authors: | TANG Xiao-li ZHANG Huai-wu SU Hua |
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| Abstract: | At present, information technology is rapidly developing to high integration density, high frequency and broadband, which requires more microchip components to be integrated on one substrate. In order to diminish the volume and weight of the system, and improve the efficiency of transmission, one way is to develop the micro-integrated technology, and the other is to miniature the components. This paper introduces the development of the thin-film inductor, one of the three most important passive components. Also, its application is described and development trend is predicted in the paper. |
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| Keywords: | thin film inductor magnetic film miniaturization application |
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