Comparative properties of ternary oxides of ZrO2-TiO2-Y2O3 obtained by laser ablation, magnetron sputtering and sol-gel techniques

Thin films of ternary oxides of zirconium (Zr), yttrium (Y) and titanium (Ti) were obtained by the sol-gel, magnetron sputtering and laser ablation techniques. Zirconium propoxide, titanium isopropoxide and yttrium nitrate hexahydrate reagents were used as precursors in the sol-gel process. The Zr/Ti and Zr/Y molar ratios have been controlled by varying the precursors and surfactant concentration. The obtained gels were supported by dip coating on α-alumina supports, dried at 373 K and calcinated at 873 K. The powders obtained after the removal of carbon residuals were subsequently pressed and calcinated for using as targets for the magnetron sputtering and pulsed laser deposition techniques. The chemical composition was determined by Auger Electron Spectroscopy. The surface topography was investigated by Atomic Force Microscopy, while the crystallinity was evaluated from X-ray diffraction. The electrical response of the deposits to nitrogen oxides (NO_x) toxic gas is discussed according to the experimental conditions.