| 一种可直接脉冲调制的MEMS红外激发源 |
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| 引用本文： | 纪新明,吴飞蝶,王建业,周嘉,谢海芬,黄宜平.一种可直接脉冲调制的MEMS红外激发源[J].光学精密工程,2005,13(2):144-150. |
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| 作者姓名： | 纪新明 吴飞蝶 王建业 周嘉 谢海芬 黄宜平 |
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| 作者单位： | 复旦大学,微电子学系,上海,200433 |
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| 基金项目： | 上海市科技攻关“微机电系统”重大专项课题“气敏传感器研究”(No.02dI11029) |
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| 摘 要： | 针对红外气体探测器对光源的要求,结合现有MEMS(微机电系统)工艺及与其兼容的IC工艺,研制了一种可用于红外多气体传感器的脉冲式MEMS辐射光源。该光源主要有Si3N4/SiO2的复合支撑层和铂金发热电极组成,可以产生相当于黑体300~800 K的红外辐射,在温度T＝1 106 K时有λ=2.62 μm峰值辐射波长;并且光源有足够强的辐射强度和2~15 μm红外辐射波段,能够满足大部分气体在2~14 μm波长范围内特征的吸收谱线的要求。经过对辐射元的动态测量可知,辐射源的动态调制频率可达到50 Hz,完全能够满足气体测量对所需红外光源调制频率的要求。
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| 关 键 词： | 红外传感 微机电系统 辐射系数 |
| 文章编号： | 1004-924X(2005)02-0144-07 |
| 收稿时间： | 2005-02-14 |
| 修稿时间： | 2005年2月14日 |
MEMS directly modulating wideband IR thermal source |
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| JI Xin-ming,WU Fei-die,WANG Jian-ye,ZHOU Jia,XIE Hai-fen,HUANG Yi-ping.MEMS directly modulating wideband IR thermal source[J].Optics and Precision Engineering,2005,13(2):144-150. |
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| Authors: | JI Xin-ming WU Fei-die WANG Jian-ye ZHOU Jia XIE Hai-fen HUANG Yi-ping |
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| Affiliation: | Department of Microelectronics, Fudan University, Shanghai 200433,China |
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| Abstract: | A mid-IR thermal source based on electrical heating of platinum film is studied. The IR source with an effectively emitting area diameter of 1.6 mm is obtained from heated platinum thin film resistors that deposit on a Si3N4/SiO2 membrane. It can emit wideband infrared light with a peak wavelength of λ=2.62 μm at 1 106 K and adapt to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of various IR gas sensors, and it can be regarded as a new thermal IR source to be used in NDIR (non-dispersive infrared) gas analyzer. |
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| Keywords: | infrared sensor micro-electro-mechanical system emissivity |
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