Investigation of a multigigahertz MOSFET amplifier with an on-chipinductor fabricated on a SIMOX wafer |
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Authors: | Harada M Yamaguchi C Tsuchiya T |
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Affiliation: | NTT System Electron. Labs., Kanagawa; |
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Abstract: | This paper describes a technology that can be used to integrate multigigahertz RF circuits into large-scale digital circuits. Spiral inductors and a MOSFET amplifier with an inductive load were fabricated on a SIMOX wafer in order to demonstrate the feasibility of SOI technology. With a 1-V supply voltage, peaking of the amplifier gain was observed, as expected from circuit simulations, at 1-4 GHz. These results show that RF circuits with inductors can be implemented on a SIMOX wafer by using the conventional digital CMOS LSI process |
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