| Design and fabrication of ultrasmall arrayed waveguide grating multiplexers based on Si nanowire waveguides |
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| 摘 要： | In the past decades, integrated optical devices based on planar lightwave circuits (PLCs) have been developed rap- idly and used in various areas, such as optical communications, optical sensing and, etc. Because of their excellent performances and the feasibility for massive productions, PLC-based integrated optical devices may take the place of discrete devices more and more in the future. In order to satisfy the increasing demands of the optical net- works with a large capacity and high s…
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| 关 键 词： | 超小阵列波导光栅 波分复用器 硅纳米线波导 设计 制造 |
| 文章编号： | 1673-1905（2007）01-0007-03 |
| 收稿时间： | 2006-09-20 |
Design and fabrication of ultrasmall arrayed waveguide grating multiplexers based on Si nanowire waveguides |
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| Authors: | Dao-xin Dai Liu Liu Sheng Zhen and Sai-ling He |
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| Affiliation: | (1) Center for Optical and Electromagnetic Research, State Key Lab. for Modern Optical Instrumentation, Zhejiang University, and Joint Research Center of Photonics of the Royal Institute of Technology (Sweden) & Zhejiang University (China), Hangzhon, 310058, China |
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| Abstract: | The large refractive index difference between Si and SiO2 makes it possible to realize ultrasmall photonic integrated circuits. A 5×5 ultracompact arrayed waveguide grating multiplexer based on 500×250 nm Si nanowire waveguides is designed and fabricated by using the technologies of E-beam writing and amorphous-Si deposition. The measured channel spacing is about 1.5 nm (close to the design value) and the channel crosstalk is about -8 dB. |
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| Keywords: | TN491 |
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