| 采用差分相位测量方法的MEMS运动表征系统 |
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| 引用本文： | 郭彤,胡春光,陈津平,傅星,胡小唐.采用差分相位测量方法的MEMS运动表征系统[J].光电子．激光,2007,18(11):1340-1343. |
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| 作者姓名： | 郭彤 胡春光 陈津平 傅星 胡小唐 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室,天津,300072 |
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| 基金项目： | 国家高技术研究发展计划(863计划)
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高等学校博士学科点专项科研项目 |
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| 摘 要： | 介绍了一种基于计算机控制的频闪干涉测试系统,用于测量可动微机电系统(MEMS)器件的离面运动,实现了nm级分辨力.系统采用五步相移高精度干涉测量方法,通过选择器件上的固定点作为参考点,实现差分测量模式,有效消除了随机误差的影响,提高了系统测量的重复性,10次测量的重复精度为3.17 nm.通过研究微谐振器的离面运动特性,说明该系统的强大功能.
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| 关 键 词： | 微机电系统 微谐振器 频闪照明 动态表征 差分测量 |
| 文章编号： | 1005-0086（2007）11-1340-04 |
| 修稿时间： | 2006-12-18 |
Dyanmic MEMS Characterization System Using Differential Phase Measurement Method |
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| GUO Tong,HU Chun-guang,CHEN Jin-ping,FU Xing,HU Xiao-tang.Dyanmic MEMS Characterization System Using Differential Phase Measurement Method[J].Journal of Optoelectronics·laser,2007,18(11):1340-1343. |
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| Authors: | GUO Tong HU Chun-guang CHEN Jin-ping FU Xing HU Xiao-tang |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University, Tianjin 300072, China |
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| Abstract: | A computer-controlled stroboscopic interferometer system is described in the paper to measure out-of-plane motions of micro electromechanical systems(MEMS) structures with nanometer resolution.This system introduces a five-step phase-shifting interferometric measurement method with high accuracy and a differential measurement mode by choosing a fixed area on the device as the reference point,which eliminates the effect of random errors efficiently and improves the measurement repeatability of the system.The... |
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| Keywords: | microelectromechanical system(MEMS) micro-resonator stroboscopic illumination dynamic characterization differential measurement |
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