Preparation of Fe-N films by r.f. sputtering

Fe-N films over a wide compositional range have been prepared by the reactive sputtering method. Fe-N sputtered films were composed of a single or two phases such as-Fe₂N,-Fe_3.02N,-Fe_3.82N,-Fe₄N and-Fe; however, an unknown phase was observed at a higher nitrogen pressure. A remarkable preferred orientation of the-Fe_3.02N (110) plane parallel to the film surface was observed. The Curie temperature of the sputtered -Fe_3.82N sample was 490° C, which was almost the same as that of-Fe₄N prepared by metal nitriding. The saturation magnetization, _s, of the sputtered Fe-N samples decreased from 151.8 to 42.4 e.m.u.g^–1 with increasing nitrogen content from 7.94 to 24.87 at%, and its coercive force,₁ H _c was found to lie in the range 150 to 600 Oe in the powder form at room temperature.