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Colour sensor for (bio)chemical/biological discrimination and detection
Affiliation:1. Physics Department, Faculty of Science, Damietta University, 34517, Egypt;2. Chemistry Department, Faculty of Science, Damietta University, 34517, Egypt;1. School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;2. Cluster of Polymer Composites (CPC), Engineering & Technology Research Platform, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;1. School of Engineering, RMIT University, GPO Box 2476, Melbourne-Vic3001, Australia;2. Institute for Frontier Materials, Deakin University, Geelong Warun Ponds Campus, Geelong-Vic3220, Australia;3. Department of Mechanical Engineering, Imperial College London, South Kensington Campus, London-SW72AZ, United Kingdom;4. School of Mechanical and Manufacturing Engineering, University of New South Wales, Sydney-NSW3220, Australia;1. Department of BIN Fusion Technology, Chonbuk National University, Jeonju 561-756, Jeonbuk, South Korea;2. Korea Institute of Carbon Convergence Technology, Jeonju 561-844, Jeonbuk, South Korea;3. Department of Chemistry, Inha University, 100 Inharo, Incheon, South Korea
Abstract:Life science is a field of dynamic development and can benefit from the usage of microelectronics in numerous applications. Various devices for separation of different (bio)chemical components from a mixture could be miniaturized in silicon, but they need detectors at their output to identify and characterize the separated elements.The colour sensor is such a detector, and it was preferred because other classical approaches typically used in chemistry or biology employ IR or UV-based analysis, for which it is more difficult to design, optimize and fabricate a silicon-based sensor.Unlike classical detection (using three different filters placed on separate detectors) the proposed device is based on an entirely different approach, using vertically stacked detectors within a single structure that can be fabricated using CMOS-compatible processing.The main requirements for the design of such a vertically stacked multi-junction structure are presented, together with details regarding the most critical processing steps and process parameter values obtained after simulation which were used in the manufacturing of the first version of the device, including some optical design aspects.
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