Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications |
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| Affiliation: | 1. Key Lab for Liquid Structure and Heredity of Materials, Ministry of Education, Shandong University, Jinan 250061, China;2. Engineering Ceramics Key Lab. of Shandong Province, Shandong University, Jinan 250061,China;1. Institute for Advanced Study, Shenzhen University, Shenzhen, PR China;2. Université Paris-Saclay, ENS Paris-Saclay, CNRS, Centre Borelli, F-91190, Gif-sur-Yvette, France;3. Department of Mathematics, The University of Hong Kong, Pokfulam Road, Hong Kong;1. Research Division for Industry and Environment, Korea Atomic Energy Research Institute, Jeollabuk-do 580-185, Republic of Korea;2. Department of Advanced Materials Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712, Republic of Korea;3. Department of Polymer Science and Engineering, Chungnam National University, Daejeon 305-764, Republic of Korea;4. Carbon Convergence Materials Research Center, Institute of Advanced Composites Materials, Korea Institute of Science and Technology, Jeollabuk-do 565-902, Republic of Korea |
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| Abstract: | Piezoelectric and electrical properties of PZT-PSN ceramics have been investigated as a function of WO3 addition from 0 to 6.0 wt%. The dielectric and piezoelectric characteristics of PZT-PSN ceramics have been investigated at different calcination (800–900°C) and sintering (1100–1300°C) temperatures. The grain size increased in proportion to adding the amount of WO3 and increasing the sintering temperatures. Anisotropic properties of electromechanical coupling coefficient and piezoelectric coefficient are proven to be dependent on processing temperatures and amount of addition. For the specimen with 0.6 wt% WO3 addition, using a calcination temperature of 800°C and a sintering temperature of 1100°C, the mechanical quality factor and electromechanical coupling coefficient were 1560 and 0.48, respectively. Thin films were deposited in situ onto Pt/Ti/SiO2/Si substrates by pulsed laser deposition using a Nd:YAG laser. The microstructure, dielectric, electrical, and piezoelectric properties of thin films with the compound ceramics have been systematically investigated for microtransformer and MEMS applications. |
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