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RBS/channelling study of ion-implanted and proton-exchanged LiNbO3:Nd:MgO planar waveguides |
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| Authors: | B Herreros G Lifante A Kling JC Soares MF da Silva PD Townsend PJ Chandler J Olivares JM Cabrera |
| Affiliation: | a Departamento de Física de Materiales, C-IV, Universidad Autónoma de Madrid, 28049, Madrid, Spain b Centro de Física Nuclear da Universidade de Lisboa, 1699, Lisbon Codex, Portugal c Departamento de Física, ITN, 2685, Sacavém, Portugal d Department of Physics and Astronomy, University of Sussex, Brighton BN1 9QH, UK |
| Abstract: | We present a structural study of two Nd3+/MgO codoped LiNbO3 waveguides fabricated by two different methods: ion-implantation and proton-exchange. Rutherford backscattering spectrometry in combination with channelling was used to study the influence of the waveguide fabrication method on the possible modification of the LiNbO3 crystal structure within the waveguiding layer. The results show that the ion-implanted waveguide mainly maintains the same properties as the virgin crystal, apart from a deterioration of a thin surface layer, whilst the proton-exchanged waveguide exhibits a quite different behaviour, although its surface is less damaged. |
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