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二氧化钒薄膜制备及其相变机理研究分析
引用本文:陈长琦,朱武,干蜀毅,方应翠,王先路. 二氧化钒薄膜制备及其相变机理研究分析[J]. 真空科学与技术学报, 2001, 21(6): 452-456
作者姓名:陈长琦  朱武  干蜀毅  方应翠  王先路
作者单位:合肥工业大学机械与汽车学院,合肥,230009
摘    要:VO2是一种固态热致变色材料,随着温度的变化它的晶态结构会从半导体态相变到金属态,而且相变可逆.由于相变前后电、磁、光性能有较大的变化,这使得它成为一种有前景的电/光转换、光存储、激光保护和智能窗材料.本文综述VO2膜的制取方法及相变机理的研究进展.

关 键 词:二氧化钒薄膜 热致变色 相变 热滞回线
文章编号:0253-9748(2001)06-0452-05
修稿时间:2001-04-02

Growth and Phase Transition Studies of VO2 Thin Film
Cheng Changqi,Zhu Wu,Gan Shuyi,Fang Yingcui,Wang Xianlu. Growth and Phase Transition Studies of VO2 Thin Film[J]. JOurnal of Vacuum Science and Technology, 2001, 21(6): 452-456
Authors:Cheng Changqi  Zhu Wu  Gan Shuyi  Fang Yingcui  Wang Xianlu
Abstract:VO 2,used as a thermochromatic material,may undergo a reversible thermally-induced metal-semiconductor phase transition.Associated with the phase transition are the considerable changes in its optical,electrical and magnetic characteristics,which makes VO 2 films an attractive material for various applications including optical and/or electrical switches,optical information storage,laser protection and solar energy control of windows.The film growth techniques and the mechanisms of phase transition were reviewed.
Keywords:VO 2 film  Thermochromic  Phase transition  Hysteresis cycle
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