| 高静电场下的薄膜测厚技术 |
| |
| 引用本文： | 周余平,于惠忠. 高静电场下的薄膜测厚技术[J]. 仪表技术与传感器, 2001, 0(8): 40-41 |
| |
| 作者姓名： | 周余平 于惠忠 |
| |
| 作者单位： | 清华大学工程物理系,北京市,100084 |
| |
| 摘 要： | 针对实际生产中遇到的薄膜静电影响问题，采用一种比较巧妙的电路方法－线圈隔离法消除了静电的影响，该技术是一种实有的在线薄膜测试量技术，也可以运用到其他电容式传感器非接触式的在线测量中。
|
| 关 键 词： | 电容式传感器 薄膜测厚 静电场 |
| 修稿时间： | 2001-01-18 |
A New Technology of Testing the Film Sickness in the Static State |
| |
| Zhou Yuping,Yu Huizhong Tsinghua University,Beijing. A New Technology of Testing the Film Sickness in the Static State[J]. Instrument Technique and Sensor, 2001, 0(8): 40-41 |
| |
| Authors: | Zhou Yuping Yu Huizhong Tsinghua University Beijing |
| |
| Affiliation: | Zhou Yuping,Yu Huizhong Tsinghua University,Beijing 100084 |
| |
| Abstract: | This paper describes a new technology of testing the sickness.We introduce a method to avoid the effect of static in the capacitance sensor. This method can especially be used in the film thickness measuring. |
| |
| Keywords: | Measurement Capacitive Sensors Film Sickness |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
