基于义齿压力检测的MEMS电容式压力传感器的研制

评价一对义齿的好坏必须了解其对口腔下方组织的作用力情况,文中根据电容式压力传感器的原理,采用MEMS工艺,结合义齿在口腔中的工作环境,研制出一种新型的医用MEMS电容式压力传感器.将传感器分布式埋植入义齿基托内,对口腔下方组织的作用力进行测试,测试结果表明,该传感器能够准确地测定出义齿下方粘膜及粘膜下方的骨组织所承受的力和力的分布.该传感器结构稳定,测量稳定性好,适用于口腔恶劣环境下测定义齿对口腔下方组织作用力的测定.

Development of MEMS capacitance sensor Based on pressure artificial denture

If we want to appraise the quality of a pair of artificial denture we have to understand its action situation organizing to the oral cavity underneath. According to the principle of the electric capacity transducer and the artificial denture in oral cavity working conditions, this thesis used the MEMS craft and developed a kind of new medical MEMS capacitance sensor. We embed the sensor in the artificial denture BASE distributedly, tested it's action condition to the oral cavity underneath and found that this sensor can measure the strength and the strength distribution of the mucous layer under the oral cavity and the bone tissue under the mucous layer accurately. This sensor has good stability in the structure and survey. It can be used in measuring the action situation of a pair of artificial denture organizing to the oral cavity underneath in bad condition.