红外光学终点检测的研究

终点检测是化学机械平坦化的关键技术,它决定着理想的平坦运行的停止点,在以纳米级别的控制上,终点检测尤为重要。目前主要的两种终点检测方法:电机电流存在着误判断,而可见光干涉存在着光蚀效应等。低能量的红外检测根据不同介质及同种介质不同厚度的红外吸收和反射系数不同的原理精确地选择平坦化终点完全克服以上检测手段的不足。阐述了其原理,设计了其硬件原理图,定性分析了红外测量曲线,并指出今后终点检测的方向。

Study on the infrared optical endpoint detection

The endpoint detection is key of the CMP technology,which can determine the perfect stop- ping point.The endpoint detection is very important by the nm control.At present,there are two meth- ods:the motor current endpoint detection has some wrong judge,and interference endpont detection which light from the laser will lead to the local chip-loss effect,making the whole chip failure.So the low-energy infrared endpoint detection will have a advantageous which based on various infrared ab- sorption of different materials,and it will reflection the different energy of different materials.The pa- per expatiate the theory.To design the hardware,to analyze the curve by measuring,and to point out the trend of endpoint detection.