| 闭环电流检测模块中Z轴TMR传感器的研制 |
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| 引用本文： | 郭彦,庞振江,王于波,郭海平,王峥,王海宝.闭环电流检测模块中Z轴TMR传感器的研制[J].传感技术学报,2018,31(2):207-212. |
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| 作者姓名： | 郭彦 庞振江 王于波 郭海平 王峥 王海宝 |
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| 作者单位： | 北京智芯微电子科技有限公司,国家电网公司重点实验室电力芯片设计分析实验室,北京100192;北京智芯微电子科技有限公司,北京市电力高可靠性集成电路设计工程技术研究中心,北京100192
江苏多维科技有限公司,江苏 张家港,215634 |
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| 基金项目： | 电网检测与控制设备用SoC芯片及智能表计电流传感器芯片 |
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| 摘 要： | 阐述了灵敏方向垂直于芯片表面的Z轴TMR传感器的设计方法,并通过溅射镀膜及刻蚀工艺,在芯片表面电镀厚度、宽度、间距分别为为10 μm、10 μm、15 μm的NiFe聚磁层,研制出了Z轴灵敏的TMR传感器.通过实际测试,该方法制备的传感器在电源电压为5 V时,灵敏度达到了5 mV/Oe,证明了该设计方法的正确性.利用所研制的Z轴TMR传感器,构建了闭环电流检测模块,电流测量范围为0~100 A,测量误差小于0.3%.
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| 关 键 词： | TMR传感器 垂直灵敏 聚磁结构 有限元分析 电流传感器 TMR sensor perpendicular sensitive flux concentrator FEA current sensor |
Study and manufacture of Z-axis TMR sensor used in close loop current measurement module |
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| GUO Yan,PANG Zhenjiang,WANG Yubo,GUO Haiping,WANG Zheng,WANG Haibao.Study and manufacture of Z-axis TMR sensor used in close loop current measurement module[J].Journal of Transduction Technology,2018,31(2):207-212. |
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| Authors: | GUO Yan PANG Zhenjiang WANG Yubo GUO Haiping WANG Zheng WANG Haibao |
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| Abstract: | We demonstrated the designing schemes of the Z-axis TMR sensor,and fabricated the Z-axis sensitive TMR sensor which sensing direction is perpendicular to its surface by sputtering film deposition and lithography process. By depositing a NiFe film with thickness,width and gap of 10 μm,10 μm,and 15 μm respectively,we get sensor with sensitivity of 5 mV/Oe under supplied voltage of 5 V,thus verified that this design method works. Utili-zing this Z-axis TMR sensor,a close-loop current measurement module with measurement range of 0~100 A and maximum detecting error of 0.3% was achieved. |
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| Keywords: | TMR sensor perpendicular sensitive flux concentrator FEA current sensor |
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