石英挠性加速度计表头力矩器噪声模型研究

石英挠性加速度计的内部力矩器噪声对于高精度的加速度计应用系统的影响是不可忽视的,但很少引起高度重视.针对高精度加速度计电路应用需要,研究了力矩器机械热噪声和力矩器线圈谐振的影响,建立了表头内部力矩器噪声电路模型,设计了测试电路,并对噪声电路模型进行了测试与验证.理论和实验结果均表明:机械热噪声产生的等效加速度对系统影响较小,力矩器线圈影响的谐振与驱动方式及驱动频率有关,脉宽调制(PWM)波驱动方式较正弦波驱动方式产生的谐振影响更大,当驱动频率靠近谐振点时,产生毫安(mA)级的谐振电流.模型的建立对石英挠性加速度计应用具有较好的参考价值.

Study of noise model for torquer in quartz flexible accelerometer header

The torquer noise in quartz flexible accelerometer is an unneglectable factor for high precision accelerometer application system,but there are less research on it.Aiming at circuit application requirements of high precision accelerometer,mechanical thermal noise and resonance of torquer coil are considered,build torquer noise circuit model,design verification circuit,test and verify the model.The results of theory and experiment show that the equivalent acceleration produced by mechanical thermal noise has a little influence on system;the resonance of torque coil is related to driving mode and frequency,pulse width modulation(PWM)drive mode have more influence on than sine drive,resonance current reach the order of magnitude of mA when drive frequency reaches resonance point.The model has good reference value for application of quartz flex accelerometer.