基于可膨胀微球/聚二甲基硅氧烷复合介电层的柔性电容式压力传感器

为解决含有微结构的柔性电容式压力传感器工作范围较窄的问题，设计了一种基于可膨胀微球/聚二甲基硅氧烷(PDMS)介电层的柔性“三明治”结构电容式压力传感器，并对介电层的结构和形貌进行表征。通过自行搭建的压力设备和电容采集设备研究了基于可膨胀微球/PDMS介电层传感器的力学性能和电学性能。结果表明:通过向PDMS介电层中加入可膨胀微球显著降低了介电层的杨氏模量，同时提高了压力下介电层的介电常数，可膨胀微球/PDMS介电层传感器的工作范围可达400 kPa，最大灵敏度达到0.06 kPa?1，在100 kPa的负载循环下具有较好的重复性和稳定性，且具有较低的迟滞性(4.7%)，可以准确迅速地检测到指尖压力，在生命健康等领域具有潜在的应用前景。 

Flexible capacitive pressure sensor based on expandable microsphere/ polydimethylsiloxane composite dielectric layer

In order to solve the problem of narrow working pressure range of microstructured flexible capacitive pressure sensors, a flexible “sandwich” structure capacitive pressure sensor based on expandable microsphere/polydimethylsiloxane (PDMS) dielectric layer was designed in this paper. Then the structure and morphology of the expandable microsphere/PDMS dielectric layer were characterized. The mechanical and electrical properties of the expandable microsphere/PDMS dielectric layer sensor based on expandable microsphere/PDMS dielectric layer were tested by self-built pressure and capacitance acquisition equipment. The results show that the Young’s modulus of the expandable microsphere/PDMS dielectric layer is significantly reduced due to the addition of expandable microsphere into PDMS, and the dielectric constant of the expandable microsphere/PDMS dielectric layer is increased under pressure. The working pressure range of the expandable microsphere/PDMS dielectric layer sensor is up to 400 kPa, and the maximum sensitivity reaches 0.06 kPa?1. The expandable microsphere/PDMS dielectric layer sensor has good repeatability and stability under the load cycle of 100 kPa, and low hysteresis (4.7%). It can detect fingertip pressure accurately and rapidly, which has potential applications in areas of life and health.