| 超精密机床定位测量技术 |
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| 引用本文： | 房丰洲,袁哲俊.超精密机床定位测量技术[J].中国机械工程,1994,5(2):49-51. |
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| 作者姓名： | 房丰洲 袁哲俊 |
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| 作者单位： | 哈尔滨工业大学 |
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| 摘 要： | 分析了国内外超精密机床及其测量系统的发展，并在我国首次提出将双路双频激光测量系统用于超精密机床的在线测量，经过稳频，信频和空气参数的补偿使测量系统达到０．０１μｍ的高分辩率。该系统数据采集快，结构紧凑，通过性好，为超精密机床的研制奠定了基础。
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| 关 键 词： | 超精密机床 激光干涉仪 定位测量 |
Positioning and Measuring Technique on Ultraprecision Turning Machine |
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| Fang Fengzhou.Positioning and Measuring Technique on Ultraprecision Turning Machine[J].China Mechanical Engineering,1994,5(2):49-51. |
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| Authors: | Fang Fengzhou |
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| Affiliation: | Fang Fengzhou |
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| Abstract: | Ultraprecision machining is one of the most important tendencies for machine building.The development of ultraprecision turning machine and its positioning and measuring system at home and abroad are studied in this paper. And it is put forward for the first time that two-axis two-frsquency laser interferometer positioning and measuring system is used on ultraprecision turning machining,hence it provides a sound basis for the development of the machining. |
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| Keywords: | ultraprecision turning machine two-frequency laser interferometer on-line measurement |
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