Role of C: Zr stoichiometry in the formation of a nanocrystalline structure and magnetic properties in Fe87-x Zr13Cx films

X-ray diffraction analysis was used to study the structure of as-sputtered and annealed Fe-13 at. % Zr-C films, which were produced by reactive magnetron sputtering and characterized by stoichiometric and nonstoichiometric (with respect to ZrC) at. % C to at. % Zr ratios. A special packet of programs was used to resolve wide reflections observed in X-ray diffraction patterns of the films. The as-sputtered films of all compositions were found to be amorphous in terms of X-ray diffraction. The thermal stability of the amorphous phase increases as the C: Zr ratio in the films departs from the stoichiometric ratio (1: 1) characteristic of the monocarbide ZrC. Annealing leads to the formation of a mixed (amorphous + nanocrystalline) structure. Depending on the carbon content and annealing temperature, the phase composition of the films is represented by different combinations of phases, such as bcc α-Fe (the basis phase), fcc ZrC, monoclinic Fe₂C, monoclinic Fe_2.5C, orthorhombic Fe₃C, and Fe₂₃Zr₆. After annealing at 550°C, the best magnetic properties are characteristic of the films having the stoichiometric composition with respect to ZrC (at. % C: at. % Zr ～ 1).