固着磨料数控加工碳化硅反射镜去除函数的研究

本文采用较为新颖的固着磨料工艺数控加工碳化硅反射镜。基于平转动加工方式的去除函数理论推导出多丸片抛光盘的去除函数模型。根据趋近因子、曲线 距离等结果对参数进行优化，由优化后的参数指导实验。通过理论模型与实验结果对比：理论最大去除率与实验偏差 ，偏差比例为5.58%；理论去除函数曲线与实验值的曲线 距离偏差 ，偏差比例为7.01%。在分析部分，引入填充因子来间接评价去除函数形状。实验结果很好的验证了理论模型的准确性。因此固着磨料工艺的加工结果有着很好的预测性，在碳化硅反射镜的精密加工领域有着极为广阔的应用前景。

Study on removal function based on computer controlled grinding SiC mirror with fixed abrasive

The paper describes a brand-new technology which is called fixed abrasive technology. The removal function model of multi-pellets polishing pad is achieved and it is based on the removal function theory of planet motion .The parameters of model have been optimized through the approaching factor,and curve rms distance . The experiment is carried out under these optimized parameters. Through the comparison of theoretical model and experimental results: the warp between theoretical maximum removal rate and experiment is , the ratio is 5.58% . The distance warp between theoretical removal function curve and experimental curve is , ratio is 7.01%. The veracity of theoretical model is verified through experimental results. So it has good prediction for the fabrication result of fixed abrasive and the fixed abrasive technology has great foreground in SiC mirror precision fabrication field.