| 用侧向力显微镜表征纳米级DLC膜摩擦性能 |
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| 引用本文： | 丁建宁,朱守星,范真,李长生,陈曦,蔡兰,杨继昌. 用侧向力显微镜表征纳米级DLC膜摩擦性能[J]. 真空科学与技术学报, 2004, 24(3): 230-232,237 |
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| 作者姓名： | 丁建宁 朱守星 范真 李长生 陈曦 蔡兰 杨继昌 |
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| 作者单位： | 江苏大学微纳米技术研究中心,江苏,镇江,212013 |
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| 基金项目： | 国家自然科学基金，教育部优秀青年教师资助计划，全国高等学校优秀博士学位论文作者专项基金 |
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| 摘 要： | 本文用侧向力显微镜(Lateral Force Microscope,LFM)研究不同厚度类金刚石(Diamond-Like Carbon,DLC)膜的摩擦性能.对厚度为153.4 nm,64.9 nm,12.07nm DLC膜摩擦力和法向力的关系进行研究,实验表明施加较低载荷,摩擦力和法向力成线性关系,符合Amontons's定律;而膜厚为4.48nm、2.78 nm样品由于粗糙度、峰态和偏态的差异导致摩擦力和载荷关系不明显,研究指出针尖和薄膜的表面接触可以简化为Tomlinson模型,借助原子晶格振动的无损摩擦机理解释了这一现象.
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| 关 键 词： | DLC膜 摩擦 标定 |
| 文章编号： | 1672-7126(2004)03-0230-03 |
Tribological Stady of Diamond-like Carbon Films with Lateral Force Microscope |
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| Ding Janning,Zhu Shouxing ,Fan Zhen,Li Changshen,Chen Xi Cai Lan and Yang Jichang. Tribological Stady of Diamond-like Carbon Films with Lateral Force Microscope[J]. JOurnal of Vacuum Science and Technology, 2004, 24(3): 230-232,237 |
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| Authors: | Ding Janning Zhu Shouxing Fan Zhen Li Changshen Chen Xi Cai Lan Yang Jichang |
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| Affiliation: | Ding Janning,Zhu Shouxing *,Fan Zhen,Li Changshen,Chen Xi Cai Lan and Yang Jichang |
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| Abstract: | Tribological properties of diamond like carbon (DLC) films with varying thickness were studied with lateral force microscopy (LFM).We found that the surfaces of the DLC films with thickness of 4 48 and 2 78 nm are much rougher than that with thickness of 12 7,64 9 and 153 4 nm.The results show that in the case of the smooth surfaces (with film thickness of 12 7,64 9 and 153 4 nm) under small load,the lateral force varies linearly with the normal force,obeying Amonton's model.But in the case of the rough surfaces (with films thickness of 4 48 and 2 78 nm),the lateral force is independent of the normal force.The possible mechanisms of nondestructive friction were tentatively explained. |
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| Keywords: | LFM |
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