A survey of problems,solution techniques,and future challenges in scheduling semiconductor manufacturing operations |
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Authors: | Lars Mönch John W. Fowler Stéphane Dauzère-Pérès Scott J. Mason Oliver Rose |
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Affiliation: | (1) Department of Industrial Engineering and Management, National Chiao Tung University, 1001 Ta Hsueh Road, Hsin-Chu 300, Taiwan R.O.C. |
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Abstract: | In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations. |
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