电子束抽运Ar+2离子准分子的动力学过程

建立了电子束抽运下 ,Ar+ 2 离子准分子的反应动力学模型。给出了与电子束能量沉积和Ar+ 2 离子准分子形成有关的反应过程。建立了反应速率方程组 ,并对该方程组进行了数值求解 ,得到了Ar+ 2 离子准分子的粒子数密度随时间的演变情况。根据粒子数密度的计算结果 ,求解了小信号增益系数 ,并将该理论计算结果与实验结果进行了比较。理论和实验结果的吻合 ,表明氩第三谱带中中心位于 2 40nm的谱区可能来源于Ar+ 2 离子准分子的跃迁。

Kinetics on Ar+2 Ionic Excimer Pumped by Electron Beam

The kinetics model of Ar + 2 ionic excimer pumped by electron beam is built. The reactions on energy deposition of electron beam and formation of Ar + 2 ionic excimer are found. The reaction rate equations are given. The equations are calculated numerically and the relation between number density of Ar + 2 ionic excimer and time is obtained. With the calculation results of number density, the small signal gain is calculated. Experimental results are compared with the theoretical results. And it is proved that the 240 nm spectrum in the third continuum originates from the transition of Ar + 2 ionic excimer.