基于二维简正模式的MEMS超声分离器模型研究

基于超声波对流体中悬浮微粒的声辐射力的相关理论和一维多层谐振分离器结构模型,提出了基于二维简正振动模式的微机电系统(MEMS)超声分离器结构模型。这种超声微分离器采用两个反相位的PZT换能器触发声场,端面利用导流槽引流,通过调整分离腔中的声场分布,可以非接触、遥操控地将悬浮微粒从稳定层流形式的悬浮液中分离出来。在(1,1)阶的二维简正模式下,对分离腔的时均压力分布数值仿真验证了分离器结构模型的可行性。

Research on MEMS Ultrasonic Separator's Model Based on Two-dimensional Normal Vibration Modes

Based on the theory of the particles suspended in fluid experience acoustic radiation forces and the structure model of one-dimensional multilayer resonance separator,the structure model based on the two-dimensional normal vibration modes was proposed.The acoustic field of this separator was stimulated by two anti-phase PZT transducers,and the guiding slots were designed in order to flow calmly.By shifting the distribution of the sound field of the resonator,the suspended particles could be separated from the suspension in the form of laminar flow by non-contact remote controlling.In the(1,1) order of two-dimensional normal vibration,the time average pressure distribution of resonator was numerically simulated in order to test the feasibility of the separator structure model.