Modular, device-scale, direct-chip-attach packaging formicrosystems

A pressing challenge to the commercial implementation of prototype microsystems is the reduction of package size and cost. To decrease package size, a process was developed for the fabrication of high-aspect-ratio, through-wafer interconnect structures. These interconnects permit device-scale packaging of microsystems and are compatible with modern surface mount technology such as flip chip assembly. To minimize package cost, a modular wafer-level silicon packaging architecture was devised. Low temperature bonding methods were used to join package components, permitting integration of driving circuitry on the microsystem die. The reconfigurable architecture allows standard package components to serve a wide variety of applications