| 基于UV-LIGA技术制造微结构器件试验研究 |
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| 引用本文： | 明平美,朱荻,胡洋洋,曾永彬. 基于UV-LIGA技术制造微结构器件试验研究[J]. 中国机械工程, 2006, 17(21): 2216-2220 |
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| 作者姓名： | 明平美 朱荻 胡洋洋 曾永彬 |
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| 作者单位： | 1. 南京航空航天大学,南京,210016;河南理工大学,焦作,454000
2. 南京航空航天大学,南京,210016 |
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| 基金项目： | 江苏省自然科学基金资助项目（BK2004214） |
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| 摘 要： | 试验研究了UV-LIGA各工艺环节（包括前后烘、曝光、显影、去胶、电铸等）对金属基片上制造金属微结构器件质量的影响，并组合优化了操作条件和工艺参数。试验结果表明：采用优化后的UV—LIGA工艺条件，制造出的金属微结构器件（如微齿轮、微流道）轮廓清晰，表面质量好，无明显缺陷，与基底结合良好。
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| 关 键 词： | UV—LIGA 微结构器件 SU-8胶 光刻 微细电铸 |
| 文章编号： | 1004-132X（2006）21-2216-05 |
| 收稿时间： | 2005-10-12 |
| 修稿时间： | 2005-10-12 |
Experimental Research on Fabrication of Micro-structures & Micro-devices by UV-LIGA |
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| Ming Pingmei,Zhu Di,Hu Yangyang,Zeng Yongbin. Experimental Research on Fabrication of Micro-structures & Micro-devices by UV-LIGA[J]. China Mechanical Engineering, 2006, 17(21): 2216-2220 |
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| Authors: | Ming Pingmei Zhu Di Hu Yangyang Zeng Yongbin |
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| Abstract: | This paper studied experimentally the influences of processing steps of UV-LIGA,including before & post exposure bake,exposure, development,resist removal,micro electroforming,on the quality of micro-structures & micro-devices fabricated on metal-substrate,and optimized their operation conditions and processing parameters.Experimental results indicate that the metal micro-structures & micro-devices such as microgear and micro flow channel fabricated by the optimized UV-LIGA processes has clear contour,good surface quality and excellent linkage with substrate,and it has not visible defects. |
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| Keywords: | UV -- LIGA micro -- structure micro -- device SU -- 8 resist photography micro electroforming |
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