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多弧离子镀合金涂层成分离析效应的物理机制研究
引用本文:张钧. 多弧离子镀合金涂层成分离析效应的物理机制研究[J]. 真空科学与技术学报, 1996, 0(3)
作者姓名:张钧
作者单位:沈阳工业高等专科学校!沈阳110044
摘    要:提出了一种关于多弧离子镀合金涂层成分离析效应的物理模型。利用该模型,从理论上较为圆满地解释了成分离析的影响因素及其作用机制。

关 键 词:多弧离子镀  合金涂层  成分离析

A STUDY ON THE PHYSICAL MECHANISM OF COMPOSITION DEMIXING EFFECT IN ALLOY COATINGS DEPOSITED BY MULTI-ARC ION PLATING
Zhang Jun. A STUDY ON THE PHYSICAL MECHANISM OF COMPOSITION DEMIXING EFFECT IN ALLOY COATINGS DEPOSITED BY MULTI-ARC ION PLATING[J]. JOurnal of Vacuum Science and Technology, 1996, 0(3)
Authors:Zhang Jun
Abstract:In this paper,a physical model about the effect of composition demixing between alloy coatings and alloy cathode material in multi arc ion plating is proposed. According to this model,the influential factors and their action mechanism for composition demixing are better explained theoretically.
Keywords:Multi-arc ion plating  Alloy coating  Composition demixing
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