Analytical electron microscopy of Al2O3 implanted with iron ions

Single crystals of -Al₂O₃ were implanted with iron ions at room temperature to fluences ranging from 4×10¹⁶ Fe cm^–2 to 1×10¹⁷ Fe cm^–2. The microstructure and composition in the implanted region were examined using analytical electron microscopy techniques. Special emphasis was placed on monitoring the microstructural changes which take place during post-implantation annealing. Clusters of metallic -Fe were identified in the specimen after implantation to a dose of 1×10¹⁷ Fe cm^–2. Analytical electron microscopy of implanted specimens annealed in oxygen revealed the redistribution of the implanted iron and the formation of surface precipitates of -Fe₂O₃, subsurface precipitates of various forms of spinel, and, in some cases, subsurface precipitates of iron, depending on the annealing temperature. Examination of implanted specimens annealed under reducing conditions revealed the presence of precipitates of -Fe.