Characterization technique in phase distribution during sample preparation for applications to solder joints and wire-bonding chips |
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Authors: | Hung-Kai Chen Shih-Hai Li Jenq-Gong Duh |
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Affiliation: | (1) Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan;(2) Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan |
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Abstract: | Characterization of solder joint microstructure is essential in evaluation of microelectronic packaging reliability. Analysis
techniques and sample preparation play important roles in the material characterization. This study demonstrates several novel
approaches in the microstructure evaluation of solder joints. By utilizing precision etching and coating techniques, the interface
of the IC packaging chip between the solder and under-bump metallization (UBM) could be revealed much more precisely and the
intermetallic compounds were distinctly visible in details by field-emission scanning electron microscopy (FE-SEM). At the
Sn-Pb/Ni/Cu interface, the intermetallic compounds defined as Ni3Sn4 and Cu6Sn5 by electron probe microanalysis (EPMA) were formed between the nickel and the solder. Meanwhile, when the Au-Al wire bonding
assembly was etched by the ion beam technique, the interface between gold and aluminum as well as the intermetallic compound
could be clearly identified. By adjusting the operating variables, such as etching energy, etching period, and incident angle
between the ion beam and sample, the time for sample preparation was significantly reduced. For example, when the cross-section
surface of the Sn-Pb solder specimen was perpendicular to the incident ion beam, the highest quality SEM micrographs were
obtained at 2.5 keV with an etching time of 7 min. and at 4.5 keV with an etching time of 3 min. |
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Keywords: | Ion beam etching and coating IC package wire bonding assembly intermetallic compound solder joint |
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