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Si衬底Al_2O_3:Eu~(3+)薄膜的溶胶-凝胶法制备及其发光性能
引用本文:石涛,周箭,申乾宏.Si衬底Al_2O_3:Eu~(3+)薄膜的溶胶-凝胶法制备及其发光性能[J].稀有金属材料与工程,2010(Z2).
作者姓名:石涛  周箭  申乾宏
作者单位:浙江大学;浙江林学院;
基金项目:浙江省重大科技计划项目(2006C11029)
摘    要:采用溶胶-凝胶法在Si衬底上制备Al2O3:Eu3+薄膜;并采用DTA-TG、XRD、SEM、AFM及光致发光光谱对其进行一系列表征,分析Al2O3:Eu3+薄膜的发光机制,探讨热处理温度和Eu3+掺杂浓度对发光性能的影响规律。结果表明,采用溶胶-凝胶法制备工艺,得到发光强度高的Al2O3:Eu3+薄膜,薄膜的最佳激发波长为265nm,Eu3+的最佳掺杂浓度为10mol%,在265nm光激发下,最强的发射峰出现在617nm附近;采用溶胶-凝胶法制备得到Al2O3:Eu3+薄膜表面致密、平整且无裂纹产生,表面粗糙度约为1.4nm,有利于硅基光电子器件的制备和应用。

关 键 词:溶胶-凝胶法  Al2O3:Eu3    薄膜  光致发光  

Preparation and Photoluminescence Properties of Eu~(3+)-Doped Al_2O_3 Films on Silicon Substrates by the Sol-gel Method
Abstract:Eu3+-doped Al2O3 films on silicon substrates were prepared by the sol-gel method. The Eu3+-doped Al2O3 films were characterized by differential thermal analysis/thermogravimetric analysis, X-ray diffraction, scanning electron microscope, atomic force microscope and photoluminescence spectra as well. The photoluminescence mechanism of Eu3+-doped Al2O3 films was analyzed. The effects of heat-treating temperature and Eu3+ ion concentration on the luminescence property of Al2O3:Eu3+ films were discussed. The re...
Keywords:sol-gel  Al2O3:Eu3  film  photoluminescence  
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