| 一种力平衡式隧道加速度传感器的特性研究 |
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| 引用本文： | 张 旭. 一种力平衡式隧道加速度传感器的特性研究[J]. 电子器件, 2001, 24(4): 295-300 |
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| 作者姓名： | 张 旭 |
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| 作者单位： | 东南大学微电子中心, |
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| 摘 要： | 本文主要阐述了闭环微硅加速度计的工作原理和动态模型，并与开环系统相比较，其一些静态和动态特性得到改善，同时，另外一些变差特性可以通过电调节方式进行改善。
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| 关 键 词： | 微硅 隧道加速度计 力平衡式 传感器 |
| 文章编号： | 1005-9490(2001)04-0295-06 |
| 修稿时间： | 2001-07-16 |
Character istic Research for a Balanc ing ForceTunnel ingMacro-accelerator |
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| ZH A N G X u. Character istic Research for a Balanc ing ForceTunnel ingMacro-accelerator[J]. Journal of Electron Devices, 2001, 24(4): 295-300 |
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| Authors: | ZH A N G X u |
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| Affiliation: | S ou theast U niv |
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| Abstract: | The paper firstly gives closed loop macro accelerator work principal and dynamic model. Then, comparing with open loop system, some performance of static and dynamic state of closed loop ones are improved, in the same time, other performance that becmes bad, could be calibrated through adding some pure electro tache into the system. In additional, some design methods in the time and frequency area are presented. |
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| Keywords: | macrosilicon Tunning accelerator force balancing. |
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