| 基于AFM的微纳米结构力学特性测量 |
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| 引用本文： | 朱纪军,王静,赵冰,沈耀春,顾宁.基于AFM的微纳米结构力学特性测量[J].微细加工技术,2000(2):55-61. |
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| 作者姓名： | 朱纪军 王静 赵冰 沈耀春 顾宁 |
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| 作者单位： | 东南大学分子与生物分子电子学开放实验室,南京,210096 |
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| 基金项目： | 江苏省自然科学基金项目(DK99006) |
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| 摘 要： | 原子力显微镜（ＡＦＭ）以其优异的特性不仅在微米、纳米的范围内获取图象。同时可以获取针尖与样品之间的作用力，为研究样品的力学性能提供了新思路。对ＡＦＭ在力学测量上的原理和应用进行了综述，并提出基于ＡＦＭ的生物样品的力学测量的新方法。
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| 关 键 词： | 原子力显微镜 力学测量 微纳米结构 |
| 文章编号： | 1003-8213(2000)02-0011-07 |
| 修稿时间： | 1999-05-31 |
Mechanical Measurement of Microstructure and Nano-structure Based on Atomic Force Microscopy |
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| ZHU Ji-Jun,WANG Jing,ZHAO Bing,SHEN Yao-chun,GU Ning.Mechanical Measurement of Microstructure and Nano-structure Based on Atomic Force Microscopy[J].Microfabrication Technology,2000(2):55-61. |
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| Authors: | ZHU Ji-Jun WANG Jing ZHAO Bing SHEN Yao-chun GU Ning |
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| Affiliation: | ZHU Ji-Jun
,WANG Jing
,ZHAO Bing
,SHEN Yao-chun
,GU Ning
;(National Laboratory of Molecular and Biomolecular Electronics, Southeast University, Nanjing 210096, China) |
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| Abstract: | Atomic force microscopy has not only revealed topographic images of surfaces with namometer ?scale resolution,but also has generated force images to measure the interaction between tip and the surface.Thus it becomes a new method for studying the mechanical properties of the sample.In this paper,A review is given about the mechanism and application of mechanical measurement by AFM and at the same time a new method for bio?material samples is put forward. |
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| Keywords: | AFM SFM mechanical measurement mechanical property bio-material sample |
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