New expressions for angular distributions

An electron scattering model (multiple reflections) based on physical quantities only is refined and extended. New expressions for the most probable scattering angle, for the angular distribution of transmitted electrons, and for the angular distribution of backscattered electrons under oblique incidence, derived by fitting to already published data or to Monte Carlo results, are presented and compared with well-established formulae. The mean path-elongation factor for a multiple reflection model is calculated by introducing a correlation of angular distributions. The value of the new path elongation factor is compared with already existing fits.