| Abstract: | Several years ago there were established a new ion-implantation technique, the so called Plasma source ion-implantation. This technique was applied on stainless steel samples to implant ions of nitrogen or oxygen into the surface in a controlled manner and to create barrier layers of nitrides or oxides, respectively. With the help of surface-analytical methods it could be shown that oxygen or nitrogen were incorporated homogeneously in a certain depth region below the outermost surface. Some measurements of the outgassing behavior of these plasma treated surfaces will be shown. The results are discussed as originated from the surface modification by the plasma treatment and the creation of the implantation layer. |
