| 补偿式光纤双法布里－珀罗微位移测量系统 |
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| 引用本文： | 朱若谷.补偿式光纤双法布里－珀罗微位移测量系统[J].激光技术,1994,18(1):61-64. |
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| 作者姓名： | 朱若谷 |
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| 作者单位： | 1.中国计量学院, 杭州, 310012 |
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| 摘 要： | 本文提出一种能补偿环境影响的,插入光纤传光介质的新型微位移测量系统和灵敏度阈的实验结果.由于采用平行双通道的结构,系统具有高精度、抗干扰的补偿法特点.该系统适合于微位移(纳米级)测量,可用于检定其它高精度位移传感器,几何量计量中定位,微细加工表面轮廓测量以及可以转换成微位移量或光程差的其它物理量测量中.
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| 关 键 词： | 补偿 双法布里－珀罗干涉仪 微位移测量 |
| 收稿时间： | 1993-03-19 |
| 修稿时间： | 1993-08-30 |
Compensated optical fibre double Fabry-Perot system for measuring micro-displacement |
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| Abstract: | A new double Fabry-Perot interferometer system with optical fibre for measuring micro-displacement and experiment study about its sensitivity threshold has been introduced in this paper.This system has the characteristics of high accuracy,interference-free compensation due to parallel double-channel configuration.Meanwhile the system may be suitable for accurate measurement of micro-displacement,such as calibration of displacement sensors,location in geometrical metrology,and for measurement of topography of fine manufactured surfaces and other physical quantities which could be transferred into displacement or optical path difference. |
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| Keywords: | compensation double Fabry-Perot interferometer micro-displacement measurement |
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