一种带摆动机构的线锯床的设计

由于线锯切割具有切片薄、表面翘曲变形小、厚薄均匀和切口损失小等优点，被广泛用于单晶硅切片加工。本文介绍了单晶硅切片加工的常用设备及其特点，分析了主要影响因素，设计了一种带摆动机构的线锯床。该摆动机构由伺服电机驱动并自动控制，与传统线锯床相比，其锯丝可绕其中点转动，加工圆形工件时，能保持锯丝与工件的接触长度最短或不变。本文还指出了该锯床制造中的几点工艺问题。

The Design of a Wire Saw with Rocking Mechanism

The wire sawing process has been applied to slice single silicon into thin wafers for its character of minimum warp, uniform thickness and low kerf loss. The common technology character and equipments used to saw single silicon were introduced. The influence factors were analyzed. A saw machine with rocking mechanism was designed. The rocking mechanism is driven by serve mo- tor and can be controlled automatically. Compared with traditional saw, this saw can rock around the middle point of the wire, so the machine can maintain a small and consistent length of contact between the wire and the work piece, if the work piece cross section is circle. The technology questions were pointed out at last.