Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing |
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Authors: | Tan Jiubin Shan Mingguang Zhao Chenguang Liu Jian |
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Affiliation: | Ultra-precision Optical and Electronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, Heilongjiang, China. |
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Abstract: | Diffractive microlens arrays with continuous relief are designed, fabricated, and characterized by using Fermat's principle to create an array of spots on the photoresist-coated surface of a substrate for parallel laser direct writing. Experimental results indicate that a diffraction efficiency of 71.4% and a spot size of 1.97 microm (FWHM) can be achieved at normal incidence and a writing laser wavelength of 441.6 nm with an array of F/4 fabricated on fused silica, and the developed array can be used to improve the utilization ratio of writing laser energy. |
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