| 高精度标准单晶硅球直径测量系统的研究 |
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| 引用本文： | 康岩辉,邾继贵,罗志勇,叶声华.高精度标准单晶硅球直径测量系统的研究[J].传感技术学报,2009,22(10). |
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| 作者姓名： | 康岩辉 邾继贵 罗志勇 叶声华 |
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| 作者单位： | 1. 天津大学精密测试技术及仪器国家重点实验室,天津,300072
2. 中国计量科学研究院,北京,100013 |
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| 基金项目： | 国家科技支撑计划资助课题 |
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| 摘 要： | 为建立我国高准确度固体密度基准和质量自然基准,对高精度标准单晶硅球直径测量系统进行了研究.论述了平面波前激光干涉法测量直径的原理和方法,分析了相移扫描、温度测量控制、以及硅球体积计算等系统的关键组成部分,并给出了各部分的实验结果.理论分析和实验结果表明,整个直径测量系统目前的不确定度为3 nm.
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| 关 键 词： | 光学测量 直径测量 硅球 相移扫描 |
Study on high-precision diameter measuring system for a single-crystal silicon sphere |
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| KANG Yanhui,ZHU Jigui,LUO Zhiyong,YE Shenghua.Study on high-precision diameter measuring system for a single-crystal silicon sphere[J].Journal of Transduction Technology,2009,22(10). |
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| Authors: | KANG Yanhui ZHU Jigui LUO Zhiyong YE Shenghua |
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| Affiliation: | KANG Yanhui1,ZHU Jigui1,LUO Zhiyong2,YE Shenghua11.State Key Laboratory of Precision Measuring Technology , Instruments,Tianjin University,Tianjin 300072,China,2.National Institute of Metrology,Beijing 100013 |
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| Abstract: | In order to establish high-accuracy solid density standard and mass natural standard in China,the high-precision diameter measuring system for a single-crystal silicon sphere is studied.The principle and method for measuring diameter by using plane-wave interferometry are discussed.The important aspects of the whole system are analyzed,including phase shift by pressure scanning method,temperature measurement and control,and volume calculation of the silicon sphere.Each result of the above is presented.Theor... |
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| Keywords: | optical measurement diameter measurement silicon sphere phase shifting |
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